Monolithic integration of mutually injection-locked CMOS-MEMS oscillators for differential resonant sensing applications

Pierre Prache 1, 2 Pietro Marris Ferreira 2 N Barniol 1 Jérôme Juillard 2
1 Departament d'Enginyeria Electrònica [Barcelona]
2 GeePs - Laboratoire Génie électrique et électronique de Paris
Abstract : Differential architectures based on two injection-locked MEMS oscillators are a promising technique for high-end resonant sensing applications since they enable environmental drift rejection and high sensitivity. But properly coupling two M/NEMS resonators together is challenging. In order to eliminate drift, the resonators must be fabricated very close to each other and to be as well-matched as possible. To this end, both resonators and the circuitry can be monolithically-integrated on a single chip. However this leads to parasitic coupling and feedthrough, which affect the performances. This paper explains how, block by block, our architecture and our chip are designed to minimize these spurious couplings. The improvements resulting from the optimization of the ASIC are illustrated by simulated and experimental results.
Keywords : resonant sensors CMOS-MEMS MEMS resonators injection-locked oscillators
Type de document :
Communication dans un congrès
23rd IEEE International Conference on Electronics, Circuits and Systems (ICECS), Dec 2016, Monte Carlo, Monaco. 23rd IEEE International Conference on Electronics, Circuits and Systems (ICECS). 〈http://icecs.isep.fr/〉
Liste complète des métadonnées

Littérature citée [10 références]  Voir  Masquer  Télécharger
https://hal-centralesupelec.archives-ouvertes.fr/hal-01418133
Contributeur : Pierre Prache <>
Soumis le : vendredi 16 décembre 2016 - 13:17:17
Dernière modification le : jeudi 5 avril 2018 - 12:30:24
Document(s) archivé(s) le : mardi 21 mars 2017 - 08:40:04

Fichier

ICECS_2016_v18.pdf
Fichiers produits par l'(les) auteur(s)

Identifiants

  • HAL Id : hal-01418133, version 1

Collections

CENTRALESUPELEC | UPMC | GEEPS | ECO2 | UNIV-PARIS-SACLAY

Citation

Pierre Prache, Pietro Marris Ferreira, N Barniol, Jérôme Juillard. Monolithic integration of mutually injection-locked CMOS-MEMS oscillators for differential resonant sensing applications. 23rd IEEE International Conference on Electronics, Circuits and Systems (ICECS), Dec 2016, Monte Carlo, Monaco. 23rd IEEE International Conference on Electronics, Circuits and Systems (ICECS). 〈http://icecs.isep.fr/〉. 〈hal-01418133〉

Exporter

BibTeX TEI DC DCterms EndNote

Partager

Métriques

Consultations de la notice

204

Téléchargements de fichiers

158

Contact

support.ccsd.cnrs.fr
hal.support@ccsd.cnrs.fr
Logo CCSD