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Structural and functional properties of Zn(Ge,Sn)N2 thin films deposited by reactive sputtering

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Submitted on : Monday, June 27, 2022 - 8:43:57 AM
Last modification on : Tuesday, July 5, 2022 - 3:12:19 AM
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Nicole Beddelem, Stéphanie Bruyere, Franck Cleymand, Sebastien Diliberto, Christophe Longeaud, et al.. Structural and functional properties of Zn(Ge,Sn)N2 thin films deposited by reactive sputtering. Thin Solid Films, Elsevier, 2020, 709, pp.138192. ⟨10.1016/j.tsf.2020.138192⟩. ⟨hal-02883424⟩

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