Structural and functional properties of Zn(Ge,Sn)N2 thin films deposited by reactive sputtering

Nicole Beddelem; Stéphanie Bruyere; Franck Cleymand; Sebastien Diliberto; Christophe Longeaud; Sylvain Le Gall; Roselyne Templier; Patrice Miska; Bérangère Hyot

doi:10.1016/j.tsf.2020.138192

Journal articles

Structural and functional properties of Zn(Ge,Sn)N2 thin films deposited by reactive sputtering

Nicole Beddelem ^{1, 2} Stéphanie Bruyere ¹ Franck Cleymand ¹ Sebastien Diliberto ¹ Christophe Longeaud ³ Sylvain Le Gall ³ Roselyne Templier ² Patrice Miska ¹ Bérangère Hyot ²

1 IJL - Institut Jean Lamour

2 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information

3 GeePs - Laboratoire Génie électrique et électronique de Paris

Document type :

Journal articles

Domain :

Physics [physics]

Physics [physics] / Condensed Matter [cond-mat]

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https://hal-centralesupelec.archives-ouvertes.fr/hal-02883424
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Submitted on : Monday, June 27, 2022 - 8:43:57 AM
Last modification on : Tuesday, July 5, 2022 - 3:12:19 AM
Long-term archiving on: : Thursday, September 29, 2022 - 4:00:20 PM

Structural and functional properties of Zn(Ge,Sn)N2 thin films deposited by reactive sputtering

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Structural and functional properties of Zn(Ge,Sn)N2 thin films deposited by reactive sputtering

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