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Journal Articles Thin Solid Films Year : 2020

Structural and functional properties of Zn(Ge,Sn)N2 thin films deposited by reactive sputtering

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hal-02883424 , version 1 (27-06-2022)

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Attribution - NonCommercial - CC BY 4.0

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Nicole Beddelem, Stéphanie Bruyere, Franck Cleymand, Sebastien Diliberto, Christophe Longeaud, et al.. Structural and functional properties of Zn(Ge,Sn)N2 thin films deposited by reactive sputtering. Thin Solid Films, 2020, 709, pp.138192. ⟨10.1016/j.tsf.2020.138192⟩. ⟨hal-02883424⟩
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