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Nicole Beddelem 1
Author Employer institution : Institut Jean Lamour
Stéphanie Bruyere 2
Author
Franck Cleymand 1
Author
Sebastien Diliberto 1
Author IdHAL : sebastien-diliberto ORCID : https://orcid.org/0000-0002-7766-0205
Christophe Longeaud 3
Author IdHAL : christophe-longeaud
Sylvain Le Gall 3
Author IdHAL : sylvain-le-gall
Roselyne Templier
Author
Patrice Miska 1
Author
Bérangère Hyot 4
Author Employer institution : Laboratoire des technologies de la microélectronique
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