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Towards the optimization of excitation waveform for electrostatic resonant sensors with enhanced frequency stability

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hal-02907057 , version 1 (27-07-2020)

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Jérôme Juillard, Alexis Brenes, Manon Gouspy, Michael Kraft. Towards the optimization of excitation waveform for electrostatic resonant sensors with enhanced frequency stability. 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), May 2019, Paris, France. pp.1-4, ⟨10.1109/DTIP.2019.8752646⟩. ⟨hal-02907057⟩
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