Skip to Main content Skip to Navigation
Conference papers

Towards the optimization of excitation waveform for electrostatic resonant sensors with enhanced frequency stability

Jérôme Juillard 1 Alexis Brenes 1 Manon Gouspy Michael Kraft 2
1 GeePs - Laboratoire Génie électrique et électronique de Paris
2 ECS Department - University of Southampton
Document type :
Conference papers
Complete list of metadata
https://hal-centralesupelec.archives-ouvertes.fr/hal-02907057
Contributor : Jérôme Juillard Connect in order to contact the contributor
Submitted on : Monday, July 27, 2020 - 9:43:28 AM
Last modification on : Wednesday, September 8, 2021 - 6:07:27 PM

Identifiers

Collections

CENTRALESUPELEC | GEEPS | SORBONNE-UNIVERSITE | CNRS | SU-SCIENCES | ECO2 | GS-ENGINEERING | INSTITUT-SCIENCES-LUMIERE

`

Citation

Jérôme Juillard, Alexis Brenes, Manon Gouspy, Michael Kraft. Towards the optimization of excitation waveform for electrostatic resonant sensors with enhanced frequency stability. 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), May 2019, Paris, France. pp.1-4, ⟨10.1109/DTIP.2019.8752646⟩. ⟨hal-02907057⟩

Export

BibTeX TEI DC DCterms EndNote

Share

Metrics