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Towards the optimization of excitation waveform for electrostatic resonant sensors with enhanced frequency stability

Jérôme Juillard 1 Alexis Brenes 1 Manon Gouspy Michael Kraft 2 
1 GeePs - Laboratoire Génie électrique et électronique de Paris
2 ECS Department - University of Southampton
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Conference papers
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https://hal-centralesupelec.archives-ouvertes.fr/hal-02907057
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Submitted on : Monday, July 27, 2020 - 9:43:28 AM
Last modification on : Saturday, June 25, 2022 - 10:49:56 PM

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CNRS | CENTRALESUPELEC | GEEPS | ECO2 | UNIV-PARIS-SACLAY | SORBONNE-UNIVERSITE | SU-SCIENCES | GS-ENGINEERING | INSTITUT-SCIENCES-LUMIERE

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Jérôme Juillard, Alexis Brenes, Manon Gouspy, Michael Kraft. Towards the optimization of excitation waveform for electrostatic resonant sensors with enhanced frequency stability. 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), May 2019, Paris, France. pp.1-4, ⟨10.1109/DTIP.2019.8752646⟩. ⟨hal-02907057⟩

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