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Towards the optimization of excitation waveform for electrostatic resonant sensors with enhanced frequency stability

Jérôme Juillard 1 Alexis Brenes 1 Manon Gouspy Michael Kraft 2
1 GeePs - Laboratoire Génie électrique et électronique de Paris
2 ECS Department - University of Southampton
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Conference papers
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https://hal-centralesupelec.archives-ouvertes.fr/hal-02907057
Contributor : Jérôme Juillard <>
Submitted on : Monday, July 27, 2020 - 9:43:28 AM
Last modification on : Thursday, September 17, 2020 - 12:26:02 PM

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CENTRALESUPELEC | GEEPS | SORBONNE-UNIVERSITE | CNRS | SU-SCIENCES | ECO2

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Jérôme Juillard, Alexis Brenes, Manon Gouspy, Michael Kraft. Towards the optimization of excitation waveform for electrostatic resonant sensors with enhanced frequency stability. 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), May 2019, Paris, France. pp.1-4, ⟨10.1109/DTIP.2019.8752646⟩. ⟨hal-02907057⟩

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