Effect of evolution of powders on a-Si:H samples in silane-argon plasma at low power density

Namita Dutta Gupta; Christophe Longeaud; A. Bhaduri; P. Chaudhuri; S. Vignoli; O. Marty

Conference Papers Year :

Effect of evolution of powders on a-Si:H samples in silane-argon plasma at low power density

(1) , (1) , , , ,

1

Namita Dutta Gupta

Function : Author

Laboratoire de génie électrique de Paris

Christophe Longeaud

Function : Author
PersonId : 6409
IdHAL : christophe-longeaud
IdRef : 076747425

Laboratoire de génie électrique de Paris

A. Bhaduri

Function : Author

P. Chaudhuri

Function : Author

S. Vignoli

Function : Author

O. Marty

Function : Author

Olivier Schneegans : Connect in order to contact the contributor

https://hal-centralesupelec.archives-ouvertes.fr/hal-00321712

Submitted on : Monday, September 15, 2008-4:57:34 PM

Last modification on : Friday, March 24, 2023-2:52:50 PM

Dates and versions

hal-00321712 , version 1 (15-09-2008)

Identifiers

HAL Id : hal-00321712 , version 1

Cite

Namita Dutta Gupta, Christophe Longeaud, A. Bhaduri, P. Chaudhuri, S. Vignoli, et al.. Effect of evolution of powders on a-Si:H samples in silane-argon plasma at low power density. 13th International Workshop on the Physics of Semiconductor Devices, 2005, India. ⟨hal-00321712⟩

Export

BibTeX TEI Dublin Core DC Terms EndNote Datacite

Collections

SUPELEC UPMC EC-PARIS CNRS SUP_LGEP CENTRALESUPELEC UNIV-PARIS-SACLAY SORBONNE-UNIVERSITE

34 View

0 Download

Effect of evolution of powders on a-Si:H samples in silane-argon plasma at low power density

Dates and versions

Identifiers

Cite

Export

Collections

Share