Structural and electrical characterization of microcrystalline silicon-carbon alloys deposited by RF-PECVD - CentraleSupélec Access content directly
Conference Papers Year : 2013

Structural and electrical characterization of microcrystalline silicon-carbon alloys deposited by RF-PECVD

Sofia Gaiaschi
  • Function : Author
Laboratoire de génie électrique de Paris
R. Ruggeri
  • Function : Author
E.V. Johnson
CV
Pavel Bulkin
Marie-Estelle Gueunier-Farret
Laboratoire de génie électrique de Paris
CV
Christophe Longeaud
Laboratoire de génie électrique de Paris
G. Mannino
  • Function : Author
Jean-Paul Kleider
Laboratoire de génie électrique de Paris
CV
P. Chapon
  • Function : Author

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https://hal-centralesupelec.archives-ouvertes.fr/hal-00931313

Submitted on : Wednesday, January 15, 2014-11:29:52 AM

Last modification on : Friday, March 24, 2023-2:52:58 PM

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hal-00931313 , version 1 (15-01-2014)

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  • HAL Id : hal-00931313 , version 1

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Sofia Gaiaschi, R. Ruggeri, E.V. Johnson, Pavel Bulkin, Marie-Estelle Gueunier-Farret, et al.. Structural and electrical characterization of microcrystalline silicon-carbon alloys deposited by RF-PECVD. E-MRS Spring Meeting 2013, May 2013, Strasbourg, France. ⟨hal-00931313⟩

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