Characterization of MEMS Resonators via Feedthrough De-embedding of Pulsed-mode Response

Alexis Brenes (1, 2) , Jérome Juillard (1) , Filipe Vinci dos Santos (2) , Bonnoit Alain (1)

1 E3S - Supélec Sciences des Systèmes
2 Chaire Conception Analogique Avancée Thales/Supélec

In this paper, we analyze and give experimental evidence of the efficiency of pulsed-mode actuation for the characterization of capacitive MEMS resonators. In particular, we show how to process the output signal in pulsed mode to eliminate parasitic feedthrough effects and characterize the resonator. We test our approach on a pressure sensor, developed by THALES Avionics, used for avionics applications. Contrary to the existing state-of-the-art techniques, the method described in this paper can be used to characterize an electrostatic MEMS without a spectrum analyzer or high-performance ADC.

Domains: Micro and nanotechnologies/Microelectronics; Signal and Image processing

Alexis Brenes, Jérome Juillard, Filipe Vinci dos Santos, Bonnoit Alain. Characterization of MEMS Resonators via Feedthrough De-embedding of Pulsed-mode Response. Eurosensors 2014, Sep 2014, Brescia, Italy. pp.823 - 826, ⟨10.1016/j.proeng.2014.11.278⟩. ⟨hal-01103772⟩